Bonding mechanism and electrochemical impedance of directly bonded liquid crystal polymer and copper

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)(2017)

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摘要
We report direct bonding of liquid crystal polymer and copper film for electrochemical sensing for the first time. A peel strength of 683 g/cm was observed indicating strong adhesion. X-ray photoelectron and electrochemical impedance spectroscopies were used to characterize the sensing electrodes.
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关键词
sensing electrodes,electrochemical impedance spectroscopy,X-ray photoelectron spectroscopy,strong adhesion,peel strength,electrochemical sensing,copper film,directly bonded liquid crystal polymer,direct bonding mechanism,Cu
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