Optical Microstructures for High Performance Inertial Sensors
2019 IEEE Research and Applications of Photonics in Defense Conference (RAPID)(2019)
摘要
We report progress on precision optical microstructures such as a postage stamp-sized optics table aimed at miniaturization and cost reduction of navigation-grade gyroscopes. Other chip-scale developments include an optical waveguide-based laser gyroscope, and resonant opto-mechanical structures with optical readout for gun-hard gyroscopes and accelerometers, respectively.
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关键词
silicon optical bench,stimulated Brillouin scattering,optomechanical resonator
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