Design And Implementation Of Micro-Liquid Jetting System Featuring Piezostack Actuator For Microelectronic Packaging

To dispense micro-liquid droplets more precisely and efficiently in microelectronic packaging field, a new needle-type micro-liquid jetting system driven by a piezostack actuator is developed in this paper, in which a diamond-shaped amplifying mechanism is adopted to amplify the displacement to a suitable range to strengthen the needle vibration and hitting during the jetting process. By analyzing the working principle and building the dynamic model of the dispenser, the paper constructs a mechanical part, a power amplifier and control module respectively. Then experiments about their working performance are undertaken and the results show that: a higher frequency produces a smaller droplet, whose volume has a linear relationship with the pressure applied to the liquid in the syringe. And the repeatability accuracy is 2.76% and 5.21% when the frequency is 20 Hz and 40 Hz respectively. This paper is used to guide design and control of these kinds of jetting dispensers.