Photolithography - Electroforming - Pulse Electrochemical Machining: An Innovative Process Chain For The High Precision And Reproducible Manufacturing Of Complex Microstructures

One benefit of Pulse Electrochemical Machining (PECM) is the residual stress-free processing of complex geometries which are difficult to produce by conventional techniques. However, a major inconvenience by applying PECM is the realization of the cathodes, when sophisticated microstructures are required. The potential of a new and innovative process chain combining photolithography, electroforming and PECM is investigated to overcome this difficulty by providing a reproducible and high precision tool manufacturing. The master microstructure is realized by photolithography and is subsequently used as template in an electroforming process to realize reproducible workpieces which serve as tools within the PECM process.