A structural criterion for simulation of optimalion-stimulated plasma growth of chained carbon

PLASMA PROCESSES AND POLYMERS(2022)

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摘要
The low-dimensional carbon allotropes have become a prominent topic of research due to their unprecedented strength and prospective physical properties. The Ar+ ion-stimulated plasma deposition of the one-dimensional carbon chains always presented a challenging task that still lacks a theoretical description. In this study, we propose a selective deposition quality criterion for the massive simulations planned to reveal the conditions for the synthesis of carbyne-containing films, in particular, linear-chained carbon by means of molecular dynamics.
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关键词
carbyne, film growth, molecular dynamics, plasma deposition, silicon substrate
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