Growth of bulk single crystal ScAlMgO4 boules and GaN films on ScAlMgO4 substrates for GaN-based optical devices, high-power and high-frequency transistors

Journal of Crystal Growth(2021)

引用 16|浏览7
暂无评分
摘要
•Production of a ScAlMgO4 single crystal by the Cz technique was demonstrated.•2-inches ScAlMgO4 crystal was confirmed to be without dislocation by XRT.•Thick GaN film was grown on a ScAlMgO4 substrate by HVPE.•The GaN film was readily separated from the substrate using its cleavability.•ScAlMgO4 substrate opens the way to produce good GaN free-standing wafers.
更多
查看译文
关键词
A1. X-ray topography,A2. Czochralski method,A3. Hydride vapor phase epitaxy,B1. Nitrides,B1. Oxides,B2. Semiconducting III-V materials
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要