X-ray diffraction analysis and X-ray topography of high-quality ScAlMgO4 substrates

•Almost dislocation-free 2-inch SAM substrates was grown by the CZ method.•A narrow RC width down to 7.2 arcsec was obtained by HR-XRC.•The Burgers vectors of dislocations was determined to be parallel to a-axis.•3D configuration of dislocations was non-destructively analyzed by XRT.•Curvature of lattice planes of SAM crystal was analyzed.