Morphological Characterization Of Carbon Nanowalls Networks Using Minkowski Functionals

JAPANESE JOURNAL OF APPLIED PHYSICS(2021)

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摘要
This paper reports the study and description of the morphology of carbon nanowalls (CNWs) based on fractal analysis and Minkowski functionals. CNWs were synthesized by chemical vapor deposition in capacitively-coupled plasma (CCP-PECVD), at various power values of the high-frequency discharge. The synthesized samples were studied using atomic force microscopy and the acquired data were analyzed using the Gwyddion 2.55 program, corresponding fractal analysis was carried out using the height-height correlation function and the power spectral density function, in addition, the Minkowski functional, which provides information on the morphology of the CNWs, was plotted.
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关键词
carbon nanowalls, atomic force microscopy, plasma, morphology, Minkowski functional, fractal analysis
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