Optimum Conditions on Support Gases for Producing Fullerene Ions and Purifying on Electron Cyclotron Resonance Ion Source

2018 22nd International Conference on Ion Implantation Technology (IIT)(2018)

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摘要
Electron Cyclotron Resonance Ion Sources (ECRISs) are widely used for many practical purposes. We are aiming at synthesizing iron-endohedral fullerene by collision reaction in vapor phase on an ECRIS. We have already succeeded in producing multiply charged fullerene ions by using fullerene evaporator in the ECRIS. In the collision reaction method for fullerene ions and iron ions, other impurities ions must be reduced. In this paper we describe the experimental results that the impurities in ion beams were decreased by using the gettering effect of Ti evaporation. We also investigated the dependence of fullerene ion beam currents on He, Ar, and Xe gas pressures. We are planning to conduct experiments to synthesize iron-endohedral fullerene with these gasses using in the ECR plasma.
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关键词
fullerene ions,iron-endohedral fullerene,support gases,ECR ion source,impurities suppression
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