Pattern Roughness Analysis Using Power Spectral Density: Application And Impact In Photoresist Formulation

Linewidth roughness (LWR) remains a difficult challenge for improvement in resist materials. We intend to review work that focused on the impact of key components of LWR by analyzing the unbiased power spectral density (PSD) curves. We studied systematic changes to ArF resist formulations and correlated these changes to the overall PSD curves. In this manner, we could extract LWR 3 sigma values and resist correlation length and the low/high-frequency roughness components. We also investigated the relationship between PSD and LWR through lithographic/etch processing and demonstrated which PSD components correspond to the largest impact on LWR. This work was extended further to investigate how frequency components are influenced by basic resist properties such as diffusion and aerial image properties such as normalized image log-slope (NILS). Particular attention was given to how changes in correlation length affected LWR as feature size decreases. We also looked at the impact of diffusion or resist blur on PSD(0) as a function of NILS. Finally, we will review how LWR improvement can be achieved by several strategies that focus on both PSD(0) and correlation length (xi) and not a single LWR number. The trends presented highlight the true nature of LWR with respect to its high and low-frequency components. It also shows the benefits of measuring and developing resists as a function of roughness power spectral density and not as a function of a single LWR measurement. (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.