3D Integrated CMOS-NEM Systems: Enabling Next-Generation Computing Technology

2021 IEEE International Meeting for Future Electron Devices, Kansai (IMFEDK)（2021）

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摘要

The emergence of the Internet of Things (IoT) has brought energy efficiency and functionality to the forefront of challenges for future integrated circuits (chips). This necessitates alternatives to conventional complementary metal-oxide-semiconductor (CMOS) transistor scaling to enhance chip performance. Integration of nano-electro-mechanical (NEM) switches with CMOS transistors can provide for i...

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关键词

monolithic integration,BEOL integration,non-volatile memory

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