Statistical analysis of passive components manufactured in a thick silicon nitride platform

In this paper, the statistical analysis of the measurements of passive components manufactured in a thick silicon nitride platform is presented. The devices studied are Asymmetric Mach-Zehnder interferometers (AMZI) and 1x2 and 2x2 Multimode Interference Couplers (MMI). Components from four different Multi-Project-Wafer runs [1], have been designed, manufactured and tested. Each run yielded two wafers and two dies per wafer have been measured and reported. The Asymmetric Mach-Zehnder interferometers were used to evaluate the propagation parameters of the strip waveguides employed in the designs. These parameters are: the propagation losses, the modal effective index and the group index. The multimode interference couplers (MMI) have been employed to evaluate the fabrication tolerances. By collecting and evaluating this statistical data across multiple dies, wafers and runs we have concluded that the designs evaluated are robust and the manufacturing process is stable within the tolerances provided by the foundry. This is fundamental for high-volume, high-yield commercial applications for future market developments in thick silicon nitride platforms as quantum, comb generations, LIDAR systems, etc.