Field-Emission Driven Microplasmas in Metallic MEMS: PIC/MCC Simulations and Direct Measurements

Particle-in-cell/Monte Carlo collision simulations including field emission effects are performed with the aim of quantifying the gas charging in microgaps encountered in metallic MEMS. Simulations are performed for a range of voltages in both Argon and Nitrogen at 1 atm pressure and comparisons are made. The net charge in the gap is shown to be positive and increases exponentially with voltage for both gases. For a given voltage it is shown that the current density in Argon is almost twice the current density in Nitrogen.