Corrigendum to “Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy”. [Measurement 188 (2022) 110373]

Measurement(2022)

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摘要
•The application of a focused electron and ion beam to deposit diamond particle.•Determination of the cantilever mass change by thermomechanical noise analysis.•Single-crystal boron-doped diamond tip usage as measuring probes.•High aspect ratio tip formation enabled by focused ion beam.•Conductive diamond tip reliability in scanning probe microscopy measurements.
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关键词
Single-crystal boron-doped diamond microparticle,Focused ion beam,Scanning electron microscope, Microcantilever,Diamond tip,Scanning probe microscope
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