Wafer level characterization of high channel count Optical Phased Array

Sylvain Guerber,Daivid Fowler,Jonathan Faugier-Tovar,Philippe Grosse,Jerome Meilhan, Kim Abdoul Karim,Jean Hue,Baptiste Delplanque,François Simoens, Bertand Szelag

2021 IEEE 17th International Conference on Group IV Photonics (GFP)（2021）

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摘要

We report on the characterization of a high channel count Optical Phased Array (OPA) at the wafer level. Using a modified prober, a 256 channel OPA has been successfully calibrated for +/-25° without requiring any packaging steps thus allowing for fast OPA testing.

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关键词

Phased arrays,Laser radar,Statistical analysis,Packaging,Rapid prototyping,Silicon,Distance measurement

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