Backside emitting silicon photonic beam steering module for LIDAR application

X. Chen,F. Meng, S. A. Fortune, A. J. Compston,M. Ebert,X. Yan,H. Du, M Banakar, D. T. Tran,C. G. Littlejohns,D. J. Thomson,R. Nicolaescu,G. T. Reed

2021 IEEE 17th International Conference on Group IV Photonics (GFP)（2021）

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摘要

We present a silicon photonic beam steering device based upon an 8 x 8 grating coupler focal plane array fed by a MZI switching tree. Transmission of the light from the grating couplers is made through the back side of the chip using topside mirrors.

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关键词

Beam steering,Laser radar,Conferences,Couplers,Switches,Silicon photonics,Gratings

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