On The Figure Of Merit Of Uncooled Bolometers Fabricated At Ino

INFRARED TECHNOLOGY AND APPLICATIONS XLII(2016)

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摘要
This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 mu m are considered. The figure of merit of the characterized detectors is below 350 mK*ms.
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关键词
Infrared, Uncooled, Microbolometer, 12 mu m, 17 mu m, 35 mu m, Gold black, Figure of merit
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