On The Figure Of Merit Of Uncooled Bolometers Fabricated At Ino
INFRARED TECHNOLOGY AND APPLICATIONS XLII(2016)
摘要
This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 mu m are considered. The figure of merit of the characterized detectors is below 350 mK*ms.
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关键词
Infrared, Uncooled, Microbolometer, 12 mu m, 17 mu m, 35 mu m, Gold black, Figure of merit
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