Non-linear dynamic characteristics analysis of multilayer electrostatic micro-beam structure.

The dynamic analysis of multi-layer cantilever beam's structure is of great significance to the structural design of MEMS devices. Due to the multi-coupling and non-linearity of the multi-layer cantilever beam, this paper presents a method for modelling and solving multilayer micro-beam. Firstly, the dynamic equation mathematical model of electrostatic multi-layer cantilever beam was established based on the energy principle and fluid film damping effect; second, the dynamic model was transformed to single-layer beam solution model by equivalent parameter method. Thirdly, Galerkin mapping reduction algorithm was used to solve this model. The theoretical computing results and simulation results can provide strong support for the study of the working motion state of the MEMS devices.