Reactive‐sputter deposition and structure of RuO2 films on sapphire and strontium titanate Q. Wang,Wayne L. Gladfelter, D. Fennell Evans,Yue Fan, Alfonso FranciosiJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films（1996）引用 23|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
