Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasmaL. Baker,A. S. Cavanagh,D. Seghete,S. M. George,A. J. M. Mackus,W. M. M. Kessels, Z. Y. Liu, F. T. WagnerJournal of Applied Physics（2011）引用 99|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
