N2plasma etching processes of microscopic single crystals of cubic boron nitrideTakahiro Tamura,Takuya Takami,Takashi Yanase,Taro Nagahama, Toshihiro ShimadaJapanese Journal of Applied Physics(2017)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要