First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart CutTM Technology

J. Widiez, S. Sollier,T. Baron,M. Martin, G. Gaudin,F. Mazen, F. Madeira, S. Favier, A. Salaun, S. Arnaud, S. David, E. Beche, H. Grampeix, C. Veytizou, D. Delprat, T. Signamarcheix

Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials（2015）

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