Fine-Pixel Detector FPIX Realizing Sub-micron Spatial Resolution Developed Based on FD-SOI Technology

A Fine-PIXel detector (FPIX) with a pixel size of 8 × 8 μm has been developed using 0.2 μm fully-depleted silicon-on-insulator (FD-SOI) technology. With four FPIXs placed in a 120-GeV proton beam, the residual to reference track showed a Gaussian spread as small as 0.63 μm when three FPIXs other than the one under investigation were used to reconstruct the track. The point resolution corresponds to 0.59–0.83 μm. This is the first result showing that a sub-micron spatial resolution can be achieved by semiconductor detector.