Gas-Flow Sensor Based on Self-Oscillating and Self-Sensing Cantilever
EUROSENSORS 2018(2018)
摘要
In this work the application of a self-sensing and self-actuating cantilever for gas-flow measurement is investigated. The cantilever placed in the flow is excited permanently at its first resonance mode. Simultaneously the resonance amplitude, the resonance frequency and the static bending of the cantilever are detected. All three sizes are related to the velocity of the gas-flow.
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关键词
gas-flow sensor,cantilever,piezo-resistive sensing,PLL,resonance mode
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