Low-voltage thin-film piezoelectric sense-actuate fan pair for chip-scale gas-sensorV. Gund,L. Sanchez, R.G. Polcawich, A. Lal2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest（2014）引用 1|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
