3D Chemical Mapping of Thin Films by Means of X-Ray Laser Microanalysis

A capillary discharge X-ray laser is a tabletop coherent source, which has matured for application in microanalysis. Soft X-ray pulses were delivered onto functional materials to induce photo-ablation in the nanoscale. Such samplings were measured inline by means of mass spectrometry, and thus perform depth profile analysis. This paper discusses the complementarity or this technique to contending microanalytical techniques, to have a direct methodology for space resolved in situ thin film characterization.