Features of the growth of casi2 layers on caf2/si(001) substrates

Vladimir Zinovyev,Aigul Zinovieva,Aleksey Kacyuba,Vladimir Volodin,Anatoly Dvurechenskii

International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis（2020）

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摘要

In this work the results on the growth of CaSi2 layers on CaF2/Si(001) substrates are presented.

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