Novel Postgate Single Diffusion Break Integration in Gate-All-Around Nanosheet Transistors to Achieve Remarkable Channel Stress for N/P Current Matching

A novel integration scheme of postgate single diffusion break (PG-SDB) has been proposed to enhance channel stress for Si gate-all-around (GAA) nanosheet field-effect transistors (NS-FET), based on TCAD simulations. Compared to conventional SDB and self-aligned SDB (SA-SDB), the proposed PG-SDB scheme implements SDB module after the replacement metal gate (RMG) process, so as to eliminate the stre...