GaN High-Electron-Mobility-Transistor on Free- Standing GaN Substrate With Low Contact Resistance and State-of-the-Art f T × L G Value

IEEE Transactions on Electron Devices(2022)

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摘要
In this article, we report on demonstrating high-performance AlGaN/GaN high-electron-mobility-transistor (HEMT) on free-standing GaN (FS-GaN) substrate with low contact resistance ( ${R}_{C}$ ) and high breakdown voltage (BV). Non-regrowth ${R}_{C}$ as low...
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关键词
Substrates,HEMTs,Wide band gap semiconductors,Aluminum gallium nitride,Ohmic contacts,Metals,Annealing
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