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Compact 31-W 96-GHz Amplifier Module in GaN-MEMS for Wireless Communications

IEEE Transactions on Microwave Theory and Techniques(2022)

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摘要
For wireless applications at millimeter-wave and terahertz frequencies, an amplifier module with power combining is critical to boosting the output power of the solid-state transmitter, and then significantly expanding the operation distance. In this article, for W-band applications, a 31-W-amplifier module is demonstrated by integrating eight-way radial combiner/splitter, mode transducers, and solid-state power amplifiers (PAs). The combiner/splitter features high efficiency and compact size, by using the in-house developed 200-mm microelectromechanical system (MEMS) process. The mode transducer provides a standard interface with commercial equipment and other circuit blocks. Moreover, eight W-band 4-W-PAs, which are designed and in-house fabricated in a 100-nm Gallium nitride (GaN) process, are integrated within the combiner using the MEMS platform. Results show that, at 96 GHz, the integrated module is able to achieve an output power of 31 W with a power-added efficiency of 13%. The demonstrated prototype is promising for wireless applications with compact size and affordable cost.
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关键词
Transducers,Silicon,Micromechanical devices,Rectangular waveguides,Power generation,Wireless communication,Gallium nitride,Gallium nitride (GaN),MEMS,millimeter-wave (MMW),radial combiner,solid-state amplifier
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