Ultrafast Femtosecond Laser Maskless Patterning for Multitype Microsupercapacitors

Downsizing electrode architectures provides great potential for the fabrication of microscale energy storage devices. With their extended voltage window and high energy density, asymmetric microsupercapacitors (MSCs) play an essential role in various applications. However, the efficient manufacturing of asymmetric MSCs remains challenging. Herein, maskless lithography–based ultrafast fabrication of multitype micron-sized planar MSCs in one step through temporally and spatially shaped femtosecond laser is presented. MSCs are only 10 × 10 µm2 in size and have a minimum line width of 200 nm. MXene and 1T-MoS2 can be combined with laser-induced MXene-derived TiO2 and 1T-MoS2-derived MoO3 to form various types of asymmetric and symmetric MSCs in the same material system within seconds. The asymmetric MSC exhibits an ultrahigh speciଁc capacitance (220 mF cm−2 and 1101 F cm−3), cycling stability (98.3% capacitance retention after 15,000 cycles), energy density (0.495 Wh cm−3) and power density (28 kW cm−3). This versatile strategy overcomes the current limitations of MSC manufacturing. Multitype MSCs fabricated herein have high resolution, enhancing the feasibility and flexibility of the preparation of microscale energy storage devices.