Fabrication of Hydrogen-Free DLC Films Using RF Plasma CVD Method with He/CO Mixied GasToru Harigai,Hikaru Ohhra,Ryoya Tominaga,Hirofumi Takikawa,Kohtaku Suzuki,Shinsuke KunitsuguThe Japan Society of Applied Physics(2021)引用 0|浏览1暂无评分关键词Thin Film GrowthAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要