Fault detection based on ICA-GLR for non-Gaussian industrial processes

ABSTRACT As the growth of Industry 4.0, online fault detection plays a crucial role in ensuring the manufacturing quality. Generally, the fault detection methods can be classified into model-based and data-driven methods. There are advantages/disadvantages between two methods. In this study, we integrated both methods in order to develop an efficient fault detection method for non-Gaussian industrial processes. The data-driven method, independent component analysis (ICA) is used to extract non-Gaussian information and dimensionality reduction. Meanwhile, the model-based method, generalized likelihood ratio (GLR) test is adopted as the charting statistic. The proposed ICA-GLR method has advantages of 1) detecting a wide range of process changes, 2) estimating the change points and 3) needless prior parameters to be specified by practitioner. The efficiency of the proposed ICA-GLR fault detection method will be verified via implementing one simulated non-Gaussian process and two real manufacturing processes: Tennessee Eastman process and semiconductor manufacturing process. Results demonstrate that the proposed ICA-GLR method has superior fault detectability when compared to traditional methods, such as principal component analysis and ICA.