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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala,Christina L. Porter,Yuka Esashi,Galen P. Miley,Robert Karl,Peter Johnsen,Nicholas W. Jenkins,Charles S. Bevis,Bin Wang, Jeremy Thurston,Xiaoshi Zhang,Seth L. Cousin,Daniel E. Adams,Michael Gerrity,Henry C. Kapteyn,Margaret M. Murnane

Metrology, Inspection, and Process Control for Microlithography XXXIII（2019）

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