Low-loss Bi-layer Edge Couplers for Blue Light

Yiding Lin,Jason C. C. Mak,Hong Chen,Xin Mu,Andrei Stalmashonak,Youngho Jung,Xianshu Luo,Patrick Guo-Qiang Lo,Wesley D. Sacher,Joyce K. S. Poon

conference on lasers and electro optics（2021）

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摘要

We report low-loss silicon nitride bi-layer fiber-to-chip edge couplers on 200-mm silicon wafers for visible spectrum photonic circuits. The minimum per-facet coupling loss at λ=488nm was ~2.6dB (TM), and polarization-independent coupling was achieved with ~3.2-dB loss.

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关键词

(130.3120) Integrated optics devices,(130.3990) Micro-optical devices

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