Fabrication tolerant design of silicon nitride Kerr comb generators

We propose a solution to implement a simulation routine suitable for the design of fabrication-tolerant Kerr- comb generators by looking at the waveguides’ geometry affected by the tolerance. The multiparameter-space analysis highlighted that while several waveguide cross-sections are suitable for the comb generation, they don’t all provide the same safety buffer toward the fabrication variability. Thus, some designs are preferred to other suitable ones. This approach paves the way to high yield, scalable and fabrication-tolerant integrated Kerr comb generators (KCGs) manufactured in complementary metal-oxide-semiconductor (CMOS) foundries.