Phase-shift Mask Fabrication at Micrometric Scale by Ion-Exchange in Glass for Astronomical Wavefront Sensors
EPJ web of conferences(2020)
摘要
Photolithography combined with ion-exchange in glass is a well-known technology that can be applied to develop many different optical devices. In this work, we present the complete procedure to generate small circular phase-shift masks with diameters of only a few microns and high control in the phase change produced. It is a strategic element in applications such as optical astronomy.
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