Single-shot, self-calibrated, real-time wavefront sensing in the EUV and Hard X-ray range for source metrology and beamline optimization

O. de la Rochefoucauld,Martin Piponnier,Fabrice Harms,Guillaume Dovillaire,Xavier Levecq,Mourad Idir,Lorenzo Raimondi,Ph. Zeitoun

OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS) (2020), paper ETh1A.2（2020）

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摘要

We present Hartmann wavefront sensors as versatile metrology tools to provide real-time characterization and optimization of sources as well as easy, at lambda optical alignment, on a spectral range from EUV to hard X-Ray.

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