Scanning Ion-Conductance Microscope with Modulation of the Sample Position along the Z-coordinate and Separate Z-axial and Lateral (X, Y) Scanning

Scanning ion-conductance microscope with independent piezoscanners in the lateral scanning plane XY and Z axis was designed and tested. For precise, fast and safe approach of the nanopipette to the sample surface, a coarse approach system based on a piezoinertial mover was used. Measurements of test periodic polymer structures were carried out using nanopipettes with an inner pipette diameter of about 100-150 nm. The optimal geometric parameters of the nanopipette were found and the resolution of the method was estimated. To increase the stability and reproducibility of SICM images, the Z-modulation of the position of the substrate with the sample was realized using a bimorph piezomembrane.