Fabrication of high aspect GaN structures by hydrogen atmosphere anisotropic thermal etching(HEATE) method with addition of ammonia gas.Akihiro Matsuoka,Yusuke Namae,Shun Ishijima,Kohei Ogawa, Yuki Ooe,Yusei Kawasaki,Akihiko KikuchiThe Japan Society of Applied Physics（2017）引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
