Investigation of the refractive index reproducibility for tantalum pentoxide coatings, prepared by PVD techniques

Olaf Stenzel,Steffen Wilbrandt,Mark Schürmann,Norbert Kaiser, Josephine Wolf,Detlev Ristau,Henrik Ehlers,Florian Carstens, Stefan Schippel, Lars Mechold, Roman Rauhut, Michael Kennedy,Martin Bischoff, Tobias Nowitzki, Alfons Zöller,Harro Hagedorn,Holger Reus, Thomas Hegemann, Kai Starke,Jens Harhausen,Rüdiger Foest, Jens Schumacher

Optical Interference Coatings 2016 (2016), paper ThD.2（2016）

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摘要

Random effects in the reproducibility of refractive index and absorption edge position of Ta2O5 layers prepared by plasma-ion assisted electron beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified.

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