総説:読むことを薦める原子層堆積法に関する初期の出版物の一覧-”ALDの歴史に関する仮想プロジェクト”の成果
Ahvenniemi Esko,R Akbashev Andrew,Ali Saima,Bechelany Mikhael,Berdova Maria,Boyadjiev Stefan,C Cameron David,Chen Rong,Chubarov Mikhail,Cremers Veronique,Devi Anjana,Drozd Viktor,Elnikova Liliya,Gottardi Gloria,Grigoras Kestutis,M Hausmann Dennis,Hwang Cheol Seong, Jen Shih-Hui, Kallio Tanja,Kanervo Jaana,Khmelnitskiy Ivan, Kim Do Han, Klibanov Lev,Koshtyal Yury,A I Krause Outi,Kuhs Jakob,Kaerkkaenen Irina, Kaeaeriaeinen Marja-Leena, Kaeaeriaeinen Tommi,Lamagna Luca,A Lapicki Adam,Leskelae Markku,Lipsanen Harri,Lyytinen Jussi,Malkov Anatoly, Malygin Anatoly, Mennad Abdelkader,Militzer Christian, Molarius Jyrki,Norek Malgorzata, OEzgit-Akguen Cagla, Panov Mikhail,Pedersen Henrik,Piallat Fabien,Popov Georgi,L Puurunen Riikka,Rampelberg Geert,H A Ras Robin,Rauwel Erwan,Roozeboom Fred,Sajavaara Timo,Salami Hossein,Savin Hele,Schneider Nathanaelle,E Seidel Thomas,Sundqvist Jonas,B Suyatin Dmitry,Torndahl Tobias,van Ommen J. Ruud,Wiemer Claudia,M E Ylivaara Oili,Yurkevich Oksana Journal of Vacuum Science and Technology(2017)
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