MgOF Films deposited by a Combined HIPIMS/CFUBMS Deposition Technique for DUV optics

Bo-Huei Liao,Chien-Nan Hsiao,Cheng-Chung Lee

Optical Interference Coatings 2016 (2016), paper TA.7（2016）

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摘要

Magnesium oxide and magnesium oxyfluoride films were deposited by a combined HIPIMS/CFUBMS deposition technique with Mg targets at room temperature.The extinction coefficient and refractive index of MgOF were 4×10-4 and 1.66 at 200 nm.

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