Green Semipolar (202̄1̄) InGaN Light-Emitting Diodes with Small Wavelength Shift and Narrow Spectral Linewidth

We study the optical spectral properties for green semipolar (20) and (201) light-emitting diode (LED) with same indium compositions. Compared to (201) devices, the fabricated (20) micro-LED (?0.005 mm2) showed negligible blue shift and smaller full width at half maximum (FWHM) up to extremely high current densities (10,000 A/cm2). Theoretical simulation indicates that the (20) InGaN quantum well (QW) has reduced polarization-related effects due to combined effects of electric field cancelling and Coulomb screening effect. In addition, the packaged device performance for small-area (?0.144 mm2) semipolar green (20) and (201) LEDs were also discussed. The green (20) LED showed smaller wavelength shift and narrower FWHM than green LEDs fabricated on other planes.