Surface Morphology and Phase Composition of (Zn,Sn)Se Thin Films, Obtained by Chemical-Molecular Beam Deposition

(Zn,Sn)Se films of different chemical composition ratio Zn/Sn were obtained by chemical molecular beam deposition (CMBD) method on borasilicate glass with variation the ratio of the partial pressure of ZnSe and SnSe in vapour phase during growth. Chemical and phase composition, as well as surface morphology of samples were investigated. The samples were found to be a thin films with a thickness of 2–3 μm with and evenly distribution of chemical elements. Grain structure, phase composition and surface roughness parameters dependencies on the elemental composition are determined.