Efficient method on the determination of optimized width of bendable mirrors with gravity compensation

RESULTS IN OPTICS(2021)

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摘要
The focusing mirror is one of the most significant optical components in the synchrotron radiation facilities, it forms a spot at the level of submicron on samples. Generally, the desired surface is in the shape of an ellipse that can be realized by mechanical bending. However, the gravity of mirrors, a non -negligible factor, affects the accuracy of the elliptic surface. As a result, optimizing the width of mirrors is the essential method to compensate the gravity. The methodology for the optimization, considering the influence of bending moments and gravity, is proposed. The conclusion indicates that this method is correct and highly efficient comparing with the existing results.
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关键词
Synchrotron radiation,Bendable mirrors,Slope error,Gravity compensation,Width optimization
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