On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting better mass sensing performance in air. In this paper, frequency resolution (bias instability) of a thermal-piezoresistive resonator operating in air at room temperature is experimentally investigated. It is found that the dynamic range decreases when increas...