Spectroscopic analyses of structural alterations in diamond-like carbon films deposited on zirconia substrates

Diamond and Related Materials(2022)

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摘要
Diamond-like carbon (DLC) films represent promising surface treatments for biomedical implants. In this paper, using Raman and X-ray photoelectron spectroscopies, we analyzed the effects of secondary phases present in ZrO2 substrates on the structure of DLC films fabricated by plasma-based ion implantation and deposition method, and the structural stability of the films in response to applied indentation prints. The results revealed oxygen incorporation in DLC films from the oxide substrates during deposition, and a clear dependence of sp3 carbon content on the oxygen fraction of the substrate and on gas pressure. Moreover, a pronounced structural distortion of the DLC films at the film/substrate interface was observed, which resulted from polymorphic transformation on the zirconia surface during deposition, while a pronounced change in Raman spectral morphology of carbon induced by structural alterations could also be observed around the indentation prints. The findings clearly pointed at the need to take into considerations the structural alterations of the DLC film structure at the interface associated with interfacial defects and film adhesion, especially for biomedical applications that involve surface loading.
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关键词
Diamond like carbon,Thin films,Structure,Raman spectroscopy,XPS
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