Ion beam assisted electron gun deposition of MgF2 thin films

A traditional method for increasing the density of the optical films, is heating the substrate. An alternative way to increase the density of the film, is bombardment of substrate by ions during film growth. This method is known as ion assisted deposition (IAD). In this paper, magnesium fluoride, MgF2, thin film has been produced on a glass substrate by ion assisted deposition method. The effects of ion energy have been studied on density and refractive index film. Reflection, transmission and scattering spectra of the samples were measured by a spectrophotometer. Moreover, Atomic force microscope (AFM) is prepared. Using these measurements, optical and physical properties of the films are analyzed. A sample of MgF2 film has been produced without ion bombardment so that one can compare the effect of ion bombardment.