Patterned growth and wafer-scale integration of 2D materials

2D Photonic Materials and Devices V(2022)

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摘要
The scalable and patterned growth of two-dimensional (2D) quantum materials is essential for wafer-scale device integration in order to transition their exciting properties and performance from lab to fab. However, the current gas-phase synthesis methods are incompatible with conventional patterning technologies (e.g., lithography) or require extensive top-down processing steps (e.g., etching) to create the desired device structures on the substrates. In this talk, I will describe some of the laser-based approaches we are undertaking to control the synthesis and integration of various 2D materials. I will particularly highlight our recently developed condensed phase growth approach compatible with direct laser writing as well as the conventional lithography and device integration technologies.
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